Used TEL / TOKYO ELECTRON Telius DRM #293627317 for sale

TEL TeliusTM DRM is an etching/ashing equipment that was developed by TOKYO ELECTRON in partnership with lithography experts at Canon. The etching/ashing system uses direct reversal masking to etch/ash the topography of a circuit design onto a semiconductor wafer. Using advanced wafer processing, TEL / TOKYO ELECTRON TeliusTM etcher/asher can remove or add material to the wafer surface in lines and patterns that mimic those of the desired circuit design. The unit works by first creating a picturesque mask from the desired circuit design, and then using a laser to direct the machine to etch/ash lines and patterns into the wafer surface. TEL TeliusTM etcher/asher is highly accurate, with a resolution of one-tenth of a micrometer (1/10 micron). It utilizes onboard numerical control to precisely execute each etching/ashing operation efficiently, enabling large-scale production with small batch sizes, and high quality product with minimal downtime. The TeliusTM tool also includes advanced, customizable parameters for power and drainage, allowing users to customize the etching/ashing process for their specific needs, boosting speed and throughput. The asset features several patented technologies for power and time saving, such as the OptiCoolTM model, which quickly responds to changing temperature and fluid pressures. TOKYO ELECTRON TeliusTM etcher/asher offers additional features, such as a built-in auto-positioning equipment, automated bottom plate detection, and a fully programmable stage, providing flexibility and high yields from large-scale production. All these features make TEL / TOKYO ELECTRON TeliusTM etcher/asher an ideal choice for fast, precise, and cost-effective etching/ashing operations.