Used TEL / TOKYO ELECTRON Telius SCCM Shin #293593000 for sale

TEL / TOKYO ELECTRON Telius SCCM Shin is an etcher/asher that can be used in semiconductor and flat panel device production. It works by using an alternative of pressure and temperature to remove layers of material from the surface of a workpiece. The Telius SCCM uses an electrode to remove material as an electrochemical reaction. The reaction occurs between the two electrodes (the workpiece and the mounted electrode) which produces anodic and cathodic ions which escort nonconductive material to the substrate surface. This is then removed from the substrate. This type of etching is known as 'dry etching' because the process is accomplished without the use of etch chemicals or solvents. The Telius SCCM is a fully automated equipment and offers a high degree of process accuracy and repeatability. It offers precision control over etch area, depth and surface roughness to ensure the highest quality etch results. The interlock system provides safety assurance and can be programmed to prevent damage to the product. The Unit is capable of processing a variety of materials (including plastic, ceramic and semiconductor). It can also be used for semiconductor applications such as dual-damascene, annular etching, and shallow trench etching (STI). High etching accuracy can be achieved with this machine, and uniformity of etching area is achieved with very little surface variation. The etch results are free of residue or contamination and have the potential to enable high yields. The Telius SCCM is ideal for semiconductor and flat panel display device production where a high degree of process accuracy and repeatability is required. The tool is capable of producing highly accurate etches with low surface variation and with minimal etch residue or contamination. This makes it a great choice for processes where exceptional yield and quality are required. The high end capability of the Telius SCCM makes it perfect for the most demanding tasks.