Used TEL / TOKYO ELECTRON Telius SCCM Shin #9190591 for sale

TEL / TOKYO ELECTRON Telius SCCM Shin (an etcher / asher) is a highly advanced etching machine designed for high-precision, high-throughput, and efficient production of semiconductor wafers. It is specifically designed for applications like MEMS devices, CMOS, ASICs, and others requiring complex etching processes. The machine has stepper motor and alloy spindle positioning technology for highly precise and repeatable results, in addition to an embedded image recognition equipment for monitoring material flow. It is also equipped with a 4-axis high speed precise servo system and automated wafer handling for quick and efficient fabrication. The unit offers precise control of etching gases, patterns, and temperatures, allowing for high-reliability process control. It also features a built-in fast gas switching machine to minimize waste gas, as well as a real-time temperature control tool that prevents undesired temperature changes. The asset is designed for fabrication of multiple materials including silicon, quartz, chromium, and tungsten. It is also capable of handling wafers up to 8 inches across with batch sizes of up to 100 pieces. With its intuitive touch screen interface and powerful software capabilities, TEL Telius SCCM Shin is an ideal choice for both prototyping and mass volume production of semiconductor devices.