Used TEL / TOKYO ELECTRON Telius SP 305 DRM #293609250 for sale

TEL Telius SP 305 DRC is an etcher / asher equipment designed for a wide range of semiconductor processes such as wet etching, dry etching, ashing, and track processes. It is an ideal system for semiconductor device and circuit fabrication, microelectronics assembly, wafer level packaging and device modification. TOKYO ELECTRON Telius SP 305 etcher / asher unit uses a high density plasma technology which is capable of producing process results with excellent repeatability and uniformity. This machine is highly efficient, as it can perform processes quickly and easily and can accommodate large volumes of production. It utilizes a multi-stage vacuum pump tool to guarantee excellent procedure control, while also providing a reliable source of atmospheric pressure. TEL / TOKYO ELECTRON Telius SP 305 etcher / asher is equipped with a variety of etching and ashing sources, such as inductively coupled plasma (ICP), external-field reaction mass spectrometer (EFRS), microwave-induced plasma (MIP), and electroncyclotron resonance (ECR) sources. The asset is optimized for low-volume process chambers, providing very tight process tolerances necessary for high-yield production. It also features a large analytical chamber for low-volume, high-precision jobs. TEL Telius SP 305 has a programmable controller capable of storing up to 99 process recipes. The automatic loading arm ensures that all process parameters, such as gas flow, pressure, RF frequency, and processing time, can be precisely and accurately controlled. This advanced controller allows users to access the various process programs easily. TOKYO ELECTRON Telius SP 305 also comes with a variety of accessories, such as a variable frequency drive and mag field measurement model. The variable frequency drive allows users to alter the process recipe according to specific requirements, while the mag field measurement equipment allows users to optimize the process to produce high yield and quality products. Overall, TEL / TOKYO ELECTRON Telius SP 305 provides an excellent etcher / asher system with unique features and capabilities, allowing it to accommodate a range of high-resolution processes. This flexible and easy-to-use etcher / asher unit provides accurate, repeatable process control and improved yields with minimal operator intervention.