Used TEL / TOKYO ELECTRON Telius SP 305 DRM #293659302 for sale

TEL / TOKYO ELECTRON Telius SP 305 DRM Etcher/Asher is a high-performance etching and ashing tool designed for a wide variety of semiconductor wafer substrates, including Silicon, SiGe, Gallium Arsenide, and Sapphire. The equipment supports both wet and dry etching/ashing processing, with advanced technology of advanced etchers and ashers enabling accurate etching/ashing for high-end film deposition. The Telius SP 305 provides high-precision etching/ashing, linearity, and uniformity that enable consistent process performance. The Telius SP 305 provides an advanced "smart" etching/ashing process control system that enables the most accurate, consistent, and time-effective etching/ashing in the industry. The Telius SP 305 allows for additional features such as sub-micron surface treatment, high-speed plane of focus scanning, etching/ashing through masks, and digital imaging capabilities. The Telius SP 305 also includes a comprehensive safety unit featuring interlock, erosion monitoring, and reverse flow protection. The machine conforms to SEMI and ESD Semiconductor Safety standards, ensuring that the tool is safe and reliable. This helps to minimize downtime and maximize productivity as it allows for rapid recovery from any mis-etch/ash, semi-permanent effects and process spills. The asset features intuitive graphical interface that provides easy access to program features and automated model information. The I/O-performance compatibility is based on standard PC hardware and software. The "Smart Etching/Ashing" technology allows for a custom etching/ashing program to be created and saved on the device for long-term data logging and recipe management. The embedded recipes enable optimal etching/ashing in the shortest possible time. Additionally, the Telius SP 305 is compatible with industry-standard chambers and enables real-time etching/ashing data capture, providing process traceability and data analysis. The Telius SP 305 etcher/asher is ideal for use in research and development of ultra-fine structure fabrication for a wide range of microelectronic devices. Overall, TEL Telius SP 305 DRM Etcher/Asher is a sophisticated etching/ashing device that provides the best-in-class performance for a wide range of semiconductor materials. It comes with an advanced etching/ashing control equipment and safety features that help to maximize efficiency and minimize downtimes. With its intuitive graphical user interface and compatibility with industry-standard chambers, the Telius SP 305 etcher/asher is the advanced etching/ashing solution for any microelectronic device fabrication.