Used TEL / TOKYO ELECTRON Telius SP 305 DRM #9397049 for sale

TEL / TOKYO ELECTRON Telius SP 305 DRM is a high performance etch/ashers that is specifically designed for the precision of lithographic process requirements. It is an advanced etch/asher that features a precision-crafted chamber for greater accuracy during the etch/ashers process. The machine utilizes three independent RF power sources to provide maximum flexibility for different etch and sputtering requirements combined with an efficient gas shower effusion system. The chamber size of TEL Telius SP 305 DRM measures 1.3m wide x 1.4m long x 0.37m deep and has a running capacity of 50 liters. The pressure inside the chamber ranges from 0 to 400 torr and can be adjusted in 1 Torr increments. The process temperature ranges from -100 to 700 degrees C with a repeatability of +/- 0.1 degree C. The uniformity of this machine is excellent, allowing for high accuracy etching of feature sizes as low as 6 microns. TOKYO ELECTRON Telius SP 305 DRM also features a kelvin probe temperature and DC bias selection option for increased process control. In order for the desired process to be achieved, the chamber of the etch/asher must be properly prepared. This process starts with cleaning of the chamber walls by using an advanced abrasion cleaning system that removes any build up of previously used materials. The chamber is then pumped out and backfilled with the appropriate process gas. This chamber is then sealed shut in order to achieve ultra-high vacuum (UHV) levels before being heated to the desired temperature. The chamber temperature is constantly monitored and adjusted by an advanced thermocouple integrated into the wall of the chamber. Telius SP 305 DRM is capable of performing both wet and dry etching processes as well as sputtering applications. The different levels of gas pressure and flow rates, as well as various combinations of RF power sources allow this etcher to achieve precision etching with higher yields and improved cycle times. A variety of analytical techniques can be also be used to monitor the progress of etching and sputtering processes. In short, TEL / TOKYO ELECTRON Telius SP 305 DRM is an advanced etch/asher with great accuracy and repeatability. Its features allow for multiple process purposes and its accurate chamber and temperature control provide improved yields and shorter cycle times.