Used TEL / TOKYO ELECTRON Telius SP 305 SCCM TE #9196852 for sale

TEL Telius SP 305 SCCM is an etcher/asher that has been designed to meet the needs of the semiconductor industry for high precision etching/ashing. It is a high-precision machine that is capable of removing a very narrow layer of material from various substrates, in order to create detailed patterns with extreme accuracy. The SP 305 SCCM is built with quality materials that make it a reliable, durable unit. It consists of a base unit and a variety of interchangeable parts, allowing users to customize the device to suit their needs. The SP 305 SCCM is equipped with a gas-mixing flow control and a programmable timer. The gas-mixing flow control is used to blend the various gases used for the etching process, and the timer ensures that the etching process is conducted for the desired length of time. In addition, this etcher/asher is also equipped with an Auto-Monitor System, which can monitor the process in real time and alert the user if any irregularities are detected. This provides users with greater control over the etching process and allows for precise results. The SP 305 SCCM has a high degree of precision, with a total placement accuracy of ±2 microns for both etching and ashing. It also offers a wide range of etching speeds, ranging from 0.5 to 50 mm/s, allowing for quick and efficient processing of substrates. Additionally, the SP 305 SCCM is equipped with a vacuum absorption system that removes particles and other pollutants from the evaporation chamber, ensuring that only pure substances are being etched/ashed. This etcher/asher has three operation modes: manual, semi-automatic, and automatic. The manual mode allows users to input each parameter manually, the semi-automatic mode allows users to create their own programs and set the timer, and the automatic mode allows for precise etching and ashing with no user input necessary. This makes the SP 305 SCCM an ideal choice for any application requiring high-precision etching or ashing. The SP 305 SCCM is easy to operate and maintain, making it an attractive choice for many different etching and ashing applications in the semiconductor industry. It is a reliable, durable, and precise device that can help to create intricate patterns with excellent accuracy.