Used TEL / TOKYO ELECTRON Telius SP 308QS #9267844 for sale
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ID: 9267844
Deep trench silicon etcher
FACE 1 (Controller)
FACE 2 (Controller)
(4) Chambers
(4) Gas boxes
QUARTZ
(2) AC Power
(4) Pumps
Pump stand
Parts:
(4) Buffer chamber pumps
(4) Chillers
Door
Chiller stand.
TEL / TOKYO ELECTRON Telius SP 308QS is an innovative etcher / asher equipment designed to provide accurate and reliable manufacturing processes for automakers, consumer electronics companies, and other industries. The SP 308QS features a high-torque two-axis horizontal stage, allowing for precise, high-speed stage positioning and processing over a wide range of speed and acceleration profiles. The advanced process control of the system ensures precise temperature control and uniform deposition of etching material across the surface area of the substrate, enabling precise etching/ashing applications. TEL Telius SP 308QS utilizes advanced software to ensure excellent process control and reliability. The built-in CAD-based recipe programs deliver consistent etching performance, while the built-in auto-printing capability greatly simplifies the work of design and prototyping. The unit also allows for easy set-up and configuration of multiple etching/ashing recipes, streamlining the process of creating custom etching and ashing recipes. TOKYO ELECTRON Telius SP 308QS machine is designed with an intuitive user interface that enables users to quickly configure, process, and monitor etch/ashers. The tool is also designed for maximum safety. Multiple safety features, including a CE Mark, IP2X electrical enclosure, and automatic process termination in the event of an emergency, ensure a safe workplace and prevent any accidents. The semiconductor etch/ash produced by Telius SP 308QS are of the highest quality and reproducibility, ensuring efficient operation and high production yields. The asset is equipped with precision process monitors that detect even the smallest changes in etching and ashing conditions, ensuring precise process control. The model also features fine-tuning capability through internal and external adjustments for etch and ash recipes. TEL / TOKYO ELECTRON Telius SP 308QS is capable of performing evaporation and etching processes at a wide range of temperatures and pressures. This ensures optimal wafer-level processing for the highest productivity. Additionally, the equipment is designed to be flexible in order to quickly accommodate new substrates and processes. This is ideal for research and development as well as for industrial production of a wide range of complex and demanding processes. TEL Telius SP 308QS is an innovative, reliable, and safe etcher/asher system designed to deliver superior quality with maximum productivity and efficiency. The unit's high-performance control systems and integrated safety features ensure a safe working environment and consistent process results, enabling users to gain maximum value from their process applications.
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