Used TEL / TOKYO ELECTRON Telius SP 308QS #9267845 for sale

TEL / TOKYO ELECTRON Telius SP 308QS is an etcher/asher designed for advanced production processes. It is suited for memory and logic device application in a wide range of process technologies from 3xnm and below. The etcher/asher utilizes a dual frequency quartz (DFQ) waveguide which delivers higher energies for a wider range of applications. TEL Telius SP 308QS features an advanced chamber design which provides excellent process uniformity and throughput. The equipment is designed with an in-chamber electrostatic chuck which enables secure wafer-to-wafer and wafer-to-ground contact, thorough wafer cleaning and a smooth etch profile. Additionally, this etcher/asher has a quad position wafer, which enables different wafer sizes in the same run, providing improved throughput and flexibility. TOKYO ELECTRON Telius SP 308QS utilizes a vacuum-tight construction with automated lid open/close and Cryo-Vesicle capturing options. It is also equipped with a multi-layer shutter system which works in tandem with the PBrF process control unit. This machine provides excellent control over product properties and helps maintain a consistent yield across different process layers and wafers. Telius SP 308QS etcher/asher also offers a range of advanced maintenance and safety features. This includes an air knife breakdown prevention tool and chemical exhaust prevention asset for improved reliability, as well as wafer-relocated single wafer and robotic arm protection systems for improved safety. TEL / TOKYO ELECTRON Telius SP 308QS etcher/asher is designed for high efficiency, accuracy, and reliable performance, making it ideal for high-end etching and ashing production processes. It offers excellent control, uniformity, and flexibility, enabling users to achieve repeatable and reliable results for their production processes.