Used TEL / TOKYO ELECTRON Telius SP 308QS #9267847 for sale

TEL / TOKYO ELECTRON Telius SP 308QS is a powerful and reliable Dry Film Asher designed for the most demanding applications in semiconductor and electronics fabrication. This high-performance equipment is capable of delivering precision etching of large and small substrates, including DRAM, Flash memory, FRAM, SRAM, EPROM and EEPROM. This etcher / asher utilizes the dual-beam technology to achieve uniform etching throughout the program. It includes an Optical Beam Column (OBC) to define an etch parameter mask for each of the individual etch steps, a charge plate which stores this OBC instruction set, and a beam alignment camera to ensure optimal beam alignment. The system houses an ultra-precise motion table, and the two etch heads can be independently adjusted for maximum accuracy. The unidirectional gas delivery unit in TEL Telius SP 308QS ensures uniform etch results. It is equipped with adjustable gas pressures, flow rates, and a gas selection machine with a selection of N2, C2H2 and O2. It includes a wide variety of etch masks to create a wide range of etching patterns, as well as a temperature and oxygen sub-control tool to guarantee consistency of the etch results. TOKYO ELECTRON Telius SP 308QS achieves a repeatable extremely high etch rate with excellent linearity, with a resolution capability of up to 1 micron in width and depth. It also offers a uniform etch rate across a wide range of wafer sizes and substrates. The asset is capable of etching complex surfaces with high definition and accuracy, while maintaining a consistent etch rate of 0.0005 to 0.002 µm/min. Telius SP 308QS is designed for easy maintenance, and comes with a user-friendly, dedicated control software with advanced alarm management, data management and analysis capabilities. It also features a graphical user interface, standard network connectivity, remote access via internet control, and an advanced security model with internal password protection. The equipment comes with an ergonomically designed, wide range of accessories for custom, high-efficiency processing.