Used TEL / TOKYO ELECTRON Telius SP SCCM DT #9204771 for sale

TEL / TOKYO ELECTRON Telius SP SCCM DT is a Silicon Carbide Chemical Mechanical Planarization (SCCM) etcher/asher. SCCM is a process of precision disturbance of a substrate using a combination of chemical etching, mechanical polishing, and repeated flood and remove of slurry to achieve a desired surface and planarization. TEL Telius SP SCCM DT provides a solution for manufacturers and engineers that need to planarize materials in nanometer-level resolutions. TOKYO ELECTRON Telius SP SCCM DT is designed with multiple chamber sizes to accommodate a variety of substrates, including silicon wafers, compound semiconductors, glass, and low-k dielectrics. With its wide-range substrate-handling capability, Telius SP SCCM DT is the optimal choice for a variety of etching and planarizing processes. TEL / TOKYO ELECTRON Telius SP SCCM DT utilizes an advanced direct drive design with a turbo blower combined with a multi-axis direct drive chuck to ensure accurate alignment, load uniformity, and repeatable end results. TEL Telius SP SCCM DT offers a three-stage, high-performance etching process. During the first stage, a slurry containing abrasive particles is used to remove surface features, such as depressions and steps caused by prior patterning. The second stage uses chemical etching to selectively etch away predetermined areas, such as trenches or channels, and prepares the surface for the subsequent planarization stage. During the third stage, a non-abrasive slurry is used to smooth out surface features and create a planar surface. In addition to its efficient etching process, TOKYO ELECTRON Telius SP SCCM DT also features an advanced monitoring and control equipment. The system provides real-time feedback on operating parameters and allows for monitoring of the statistical process from start to finish. In addition, Telius SP SCCM DT includes numerous safety and environmental protection features, such as active venting, cascading layer gas controllers, and a dual-stage safety shutter unit. TEL / TOKYO ELECTRON Telius SP SCCM DT is a reliable, high-performance etching and planarizing machine that offers users an effective and reliable etching and planarizing solution. Ideal for a variety of applications, TEL Telius SP SCCM DT is designed for accuracy, efficiency, and reliability.