Used TEL / TOKYO ELECTRON Telius SP #293634370 for sale

TEL / TOKYO ELECTRON Telius SP is a state-of-the-art etcher/asher that offers improved process control, unmanned capability, and flexibility. Suitable for wafer level processing applications, the equipment features high etch selectivity, with deep etch processes, fast chemically-assisted etching, and etch and backside sputter processes. Its user-friendly interface and superior throughputs provide a high level of performance for a wide range of applications. TEL Telius SP system is equipped with a precision laser-based wafer stages, a sophisticated wafer surveillance unit, and advanced process control. Its design enables highly reliable, repeatable processes and high etching accuracy due to its high repeatability and maximum positioning speed. Not only is it capable of wafer backside laser video inspection and automatic labeling processes, but it also can perform automatic backside time and temperature control as well as closed loop alignment. The backside sputtering and etching processes can be performed in one go on TOKYO ELECTRON Telius SP. The process is accelerated by its special gas control systems and fully automated backside sputtering and etching processes, including cleaning. The machine is also equipped with a built-in inert gas machine and features a breakout chamber and venting capabilities to provide maximum protection of the chamber environment. The wafer laser capable delivery mechanism on Telius SP uses a microcomputer-controlled shuttle to ensure reliable transfer of wafers. This process provides superior repeatability, accuracy, and reliability for long term processes. The tool has a high productivity interface and automated functions like automatic completion to minimize user input and minimize errors. The universal wafer size support allows for the efficient processing of various wafer sizes, from 8 inch to 200 mm sizes. The asset also supports a variety of different process substrates, including silicon oxide and polyimide, in addition to the common substrate materials such as glass, quartz, and fused silica. In summary, TEL / TOKYO ELECTRON Telius SP is an advanced etcher/asher that offers excellent process control, superior productivity, and flexible process capabilities. The model features laser-based wafer stages, wafer video inspection, automatic backside etching and sputtering, and universal wafer support, all of which provide superior repeatability, accuracy, and reliability across a range of wafer sizes and process substrates.