Used TEL / TOKYO ELECTRON Telius SP #9197565 for sale
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ID: 9197565
Wafer Size: 8"
Vintage: 2004
Oxide etcher, 8"
(3) Telius SP vesta chambers
2004 vintage.
TEL / TOKYO ELECTRON Telius SP is a high-performance plasma etcher designed for advanced semiconductor fabrication processes. This etcher is equipped with one of the highest plasma sources in the industry and offers high throughputs with excellent accuracy. It is also highly configurable to meet various process demands. TEL Telius SP features an advanced plasma source technology which allows for highly reactive energetic ions and denser plasmas. This technology helps to significantly reduce cycle times for etching processes and enables faster production operations. The equipment also offers superior precision, with optimal uniformity and repeatability of etched features. It has a wide range of configurability options which allow it to be tuned for a wide variety of semiconductor processes. The system also features a comprehensive suite of monitoring and control tools, such as temperature sensors and humidity sensors. This helps to ensure optimal etching conditions and reduces the possibility of process contamination. It also features integrated data logging which allows the user to monitor and review their processes for quality assurance and troubleshooting. The unit offers a user-friendly interface with intuitive controls, making it easy to learn and operate. It easily integrates into existing semiconductor fabrication systems and is compatible with both batch and single-wafer processing requirements. Overall, TOKYO ELECTRON Telius SP is an advanced etching machine that offers excellent accuracy, fast throughputs, and materials compatibility. It is an excellent choice for leading-edge semiconductor fabrication processes, offering the utmost precision and configurability.
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