Used TEL / TOKYO ELECTRON Telius SP #9197570 for sale

TEL / TOKYO ELECTRON Telius SP is a parallel cluster-type etcher/asher ideal for high-volume production. It is a cost-effective solution for creating complex 3D structures with preciseness and accuracy. It has a simple and user-friendly operating equipment which makes it well-suited for guiding operators through advanced process recipes. TEL Telius SP contains four distinct with modules for the wafer's photoresist coating, pre-treatment, etching, and ashing of the top surface. Each module is constructed for a reliable and repeatable performance with little downtime. The pre-treatment includes oxygen and fluorine injections, which make the surfaces smooth and even. An electrostatic chuck is used to hold the wafer in place, and an advanced impedance system includes the ASYST Real-Time Plasma Unit, for controlling the plasma power. The etching module consists of a high-powered plasma process, capable of creating a deep, complex 3D structure down to a micron size with a high degree of accuracy and precision. The etch time and materials used are both monitored and controlled automatically to ensure a quality result. Furthermore, a multi-axis cassette is available for precision substrate mounting, and a private EMGD CCD camera is included to monitor the DI water level during rinse operations. The ashing module uses a high powered oxygen plasma to remove both organic and inorganic photoresist. It also provides a smooth finish for the surface, with 0.1µm depth of precision. This module also features circumferential shielding that prevents particles emitted from the plasma process from scattering the wafers in the neighboring compartments. TOKYO ELECTRON Telius SP has a large capacity of up to 2,400 substrates, making it the ideal choice for high-volume production. It is also compatible with most chemicals and gases and comes with a modular design, making it easy to upgrade. Furthermore, the machine is highly automated with a wide range of built-in safety features that ensure its long-term operation. This makes Telius SP the perfect solution for processing high-resolution structures with precision and accuracy.