Used TEL / TOKYO ELECTRON Telius SP #9197588 for sale

TEL / TOKYO ELECTRON Telius SP
ID: 9197588
Wafer Size: 8"
Vintage: 2005
Oxide etcher, 8" (3) Telius SP vesta chambers 2005 vintage.
TEL / TOKYO ELECTRON Telius SP is an advanced etching equipment designed for the production of electronic components. This model is a self-contained system consisting of a main workstation, a vacuum chamber and an external nitrogen unit. It is equipped with cutting-edge technology such as high-precision beam scanning, ultra-high vacuum processes, and automatic wafer-lift and nitrogen-pump functions. The machine is suitable for preparation of small-sized components such as capacitors, transistors, and resistors. The tool has an innovative three-dimensional motion asset, which enables accurate and precise control of the motion along the x-axis, y-axis and z-axis, ensuring high-precision etching and deposition. In addition, the model's ultra-high vacuum capability guarantees the elimination of contaminants, which is essential for advanced processes. TEL Telius SP has a wafer-lift function, which facilitates handling of wafers even in small spaces. It also has an independent Nitrogen equipment, designed to precisely manage Nitrogen deposition according to the design patterns, and also to achieve extremely thin deposition films. TOKYO ELECTRON Telius SP is designed to achieve fast processing throughput, as well as faultless etching and deposition. It can process multiple wafers simultaneously and process successive processes without stopping. It is also equipped with a Setup program that allows an operator to easily preview and adjust processing conditions up to 8 cycles of wafers. Telius SP's intuitive user interface includes a convenient graphical touch screen, together with a PC based software environment. The combination of intuitive user interface and an easy to use PC software allows engineers to quickly preview, edit, and adjust processing conditions to their desired specifications. The system also offers a wide range of recipes, built-in editing tools, as well as the ability to transfer data to other machines. TEL / TOKYO ELECTRON Telius SP is powered by an embedded operating unit, which uses advanced artificial intelligence technologies to minimize errors and optimize results. The machine also complies to environmental safety standards, ensuring reliable operation and preservation of the operator's safety. Overall, TEL Telius SP from TEL is an advanced etching tool with cutting-edge technology as well as superior user-friendly interface, making it suitable for producing high-precision components. Its unique nitrogen asset, wafer-lift function and easy operating environment provide for a comprehensive processes for the production of electronic components.
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