Used TEL / TOKYO ELECTRON Telius SP #9197601 for sale

TEL / TOKYO ELECTRON Telius SP is an etcher / asher that has been engineered to provide for large-scale, precision etching and ashing operations. This equipment has been designed with an open architecture that allows for process optimization, as well as integration into production lines. TEL Telius SP is driven by a powerful generator to ensure stable process performance, with adjustable voltage, current, total etching time and pulse pulse/off convenience. This system has been developed to provide large-scale etching processes, accommodating up to 6" wafer diameters, and utilizing a hybrid-type dry etching/high-density plasma methods to enable ultra-high-precision films. TOKYO ELECTRON Telius SP utilizes a high power generator for robust, stable etching and ashing processes, with top-end frequency of up to 300GHz and high-frequency electric power up to 20kW. This etcher / asher is able to handle a wide variety of process gases, from oxygen and nitrogen to rare gases and is equipped with a special plasma cleaning process functionality. Additionally, Telius SP features highly controllable microwave mode and ignitor command capability, 4-way switching, multi-shot firing, high-precision grade operation with memory-arrayed process data and perfect uniformity of etched layers across the wafer. With its automatic alignment and cassette-based loading/unloading capability, TEL / TOKYO ELECTRON Telius SP provides for a fully automated process flow with low throughput time and excellent performance. The unit has been designed for optimal maintenance capability, allowing for fast, reliable response to service requests. The whole machine is paired with a comprehensive software package containing a high degree of parameter customization, graphical user interface (GUI), and export/import of process data, allowing for smooth integration into production lines. All in all, TEL Telius SP etcher / asher delivers a cutting-edge solution for precision etching and ashing operations. With its top-end performance, wide range of process capabilities, and automated process flow, TOKYO ELECTRON Telius SP is an ideal choice for production lines that require high efficiency and excellent precision.