Used TEL / TOKYO ELECTRON Telius SP #9197607 for sale

TEL / TOKYO ELECTRON Telius SP is an etcher/asher designed to provide high throughput and excellent particle control for substrate processing. The etcher/asher is suitable for all types of substrates and features an automated chamber pressure control system and a multi-axis processing head. The etcher/asher has a compact design with a small footprint and high throughput rate of 4 gas inputs. The etcher/asher features a highly precise 6-axis processing head, which can move up and down and rotate freely, and can also tilt with an accuracy of up to +/- 0.1 degree. The chamber has a rectangular shape and can accommodate substrates up to 200x200mm. The pressure inside the chamber is controlled with a sophisticated control system, which maintains a constant pressure of 1.3 Torr during the etching process. The etcher/asher also has a multi-stage wafer handling technology, which enables efficient processing of various types of substrates. The etcher/asher is ideal for advanced MEMS and semiconductor applications and features a remote control operation system with a graphical user interface for setting up recipes. It also supports remote maintenance and software upgrade. The unit is has built-in gas purification units to reduce the number of particles emitted from the etching process. It also features an infrared sensor that can detect the presence of particles in the chamber and adjust the pressure accordingly. The etcher/asher also has a low power consumption, making it suitable for all kinds of operations. Additionally, the etcher/asher uses a low temperature plasma process for etching, which reduces the number of thermal defects on the substrate. Furthermore, TEL Telius SP etcher/asher comes with a lifetime warranty and it is compatible with all types of etching gases and gas delivery systems.