Used TEL / TOKYO ELECTRON Telius SP #9197608 for sale

TEL / TOKYO ELECTRON Telius SP is an etcher/asher with state-of-the-art technology for producing high quality results. This tool is designed to enable production of electronic circuits with exceptionally small line widths, high aspect ratio topographies, and precise profile control. The instrument's processing chamber measures 19.7 x 19.7 x 3.1 in (500 x 500 x 80 mm), and can handle 295 mm diameter wafers. It is equipped with a vertically aligned, dual stage, diaphragm pump which is used to maintain process pressure. Additionally, it features total gas delivery equipment that enables independent control of 8 gases, such as O2, BCl3, C4F8. It provides several configurations for different etch requirements, such as resist stripping, deep trench etching, cavity etching, profiling, and pattern transfer. The system also has a highly precise digital scan generator that enables high speed scanning of the wafer. In addition, its tilt compensation technology, used in combination with precision mechanical stage, ensures uniformity across the entire wafer surface. Moreover, its surface mapping unit allows for uniformity optimization from the center to the edge of the wafer. And its advanced process monitoring helps ensure the best quality performance. To enable maximum performance, TEL Telius SP comes with a customized user interface that enables easy operation. Its digital process control features real-time process monitoring and control, making it easy to set up and maintain reliable processes. Lastly, its automatic recipe execution machine provides maximum process accuracy and repeatability. TOKYO ELECTRON Telius SP is the ideal tool for etching/ashing of surfaces with extremely fine patterning. Its advanced features and options offer greater precision, rugged performance and process flexibility, making it suitable for the most demanding applications.