Used TEL / TOKYO ELECTRON Telius SP #9398280 for sale

TEL / TOKYO ELECTRON Telius SP is an etcher / asher designed to perform a range of etching, cleaning and other advanced processes. It offers high versatility and is a reliable choice for a variety of technologies. TEL Telius SP features a multi-stage configuration for optimized performance, capable of running a variety of processes including reactive-ion etching, chemical vapor deposition, annealing, etching with high-density plasma, ashing, and others. It is built around a quartz tube with an externally adjustable booster power supply that can control gas pressure and flow. The SP also has an advanced control panel and a variety of other user-friendly features. TOKYO ELECTRON Telius SP is a reliable choice for the most challenging etching and cleaning processes due to its high level of performance and excellent quality assurance. It is thoroughly tested to ensure superior performance and unmatched reliability in terms of uniformity, repeatability, and stability. The advanced control panel and adjustable booster power supply enable users to adjust various parameters such as pre-etching/slow-etch rates, passivation speeds, and line speeds to optimize their process and maximize productivity. Telius SP also features an advanced safety system that provides real-time monitoring and control of the etching process, from start to finish. The sophisticated safety features include shutoff valves and automated processes for an effective containment system in the event of an over-pressure incident. This system is monitored by a built-in controller with ethernet, USB, and VGA ports for communication. In summary, TEL / TOKYO ELECTRON Telius SP is an excellent choice for performing challenging etching and cleaning processes. It is designed to meet the highest industry standards in terms of performance, reliability, safety and productivity, providing users with a reliable and quality-assured etching solution.