Used TEL / TOKYO ELECTRON Telius SP #9402146 for sale

TEL / TOKYO ELECTRON Telius SP is an advanced etcher/asher system, used for dielectric etching and wafer cleaning in the semiconductor device manufacturing industry. It is a fully automated and high-performance system that offers unparalleled accuracy, repeatability, and throughput. TEL Telius SP is equipped with a 9kW RF power supply, and an RF matching network for optimal etch/clean process control. The machine is also equipped with an atmospheric pressure plasma source, allowing for high-rate and uniform processing. TOKYO ELECTRON Telius SP is designed for top-side or bottom-side etching of dielectric layers on wafers, or etching of openings in substrates and masks. The etching capability is backed by a highly accurate and repeatable process; this ensures consistent results while saving time and costs. In addition, the system has both end point detectors and shadow mask aligners, and can be used for both positive and negative etch processes. Telius SP also includes a high-precision wafer cleaning component, allowing for the removal of contaminants from wafers. The machine uses a unique high-density plasma, process time optimization, and accelerated wafer motion technology to eliminate debris on the wafer surfaces. The sytem also features integrated particle monitoring, delivering unparalleled cleaning performance with a maximum unloaded particle rate of <5 particles/cm2/min. Overall, TEL / TOKYO ELECTRON Telius SP provides a reliable and efficient etching/cleaning tool for semiconductor device manufacturing. Its advanced features, such as automated process control, shadow mask aligners, and high-density plasma cleaning ensure superior results with superior repeatability and throughput.