Used TEL / TOKYO ELECTRON Telius SP #9412454 for sale

TEL / TOKYO ELECTRON Telius SP is an etcher/asher designed for semiconductor production. This tool is capable of etching high-precision patterns on substrates, such as wafers, with a etch rate up to 1.7 µm/min in Ar/SF6 plasma. This etcher is ideally suited for the fabrication of advanced devices and circuits. TEL Telius SP etcher comes with a large chamber, which provides an ideal etching environment by reducing pressure and chemical concentrations that can affect etch rates. An improved version of the original pressure equipment prevents pressure disturbances in the chamber and also helps to reduce cross contamination between process runs. The unit is also equipped with an advanced wafer-level substrate orientation system, allowing for repeatable height and orientations accuracy of the wafer being etched. TOKYO ELECTRON Telius SP is equipped with a Generalized Automation Interface (GAI), which enables the user to set up, monitor, and control etching recipes and parameter adjustments in real time. This advanced automation allows operations to be completed quickly and reliably without user intervention. Process recipes present a convenient methodology for etching structures of varied geometries onto substrates, either singly or in a batch format. Telius SP etcher also features an advanced Intelligent Diagnostics Unit (IDS), which assists in ensuring optimal performance. This machine uses a suite of sensors to continuously monitor process conditions and can adjust recipe parameters to ensure the best results. This etcher also uses a unique three-dimensional electrode tool, providing superior area coverage rates as well as smaller metal-interconnecting line widths. TEL / TOKYO ELECTRON Telius SP etcher is designed to reduce maintenance and repair costs. The unit incorporates a robust design with quick-removal components, making it easy to maintain and repair the etcher quickly and efficiently. The etcher also offers a low-pressure correction asset and an intelligent cleaning model, which helps to reduce downtime during maintenance periods. In conclusion, TEL Telius SP etcher/asher is an all-in-one machine designed for fabricating semiconductor products. It is capable of fast, high-precision etch rates on substrates and offers several advanced features, including automation and diagnostic systems, to ensure optimal performance. This machine is ideal for the production of advanced devices and circuits, and offers tremendous reliability, repeatability, and low-maintenance costs.