Used TEL / TOKYO ELECTRON Telius TSP-30555SS (JIOX) #293646437 for sale

TEL Telius TSP-30555SS (JIOX) is an etcher/asher designed for wafer applications in semiconductor manufacturing. The unit features a large process chamber that allows for a full range of etching operations, such as reactive ion etching (RIE), etch-back, ion milling, ion etching, and deep reactive ion etching (DRIE). The chamber also has adjustable gas flow and an automatic gas switch, so that users have the flexibility to work with various etching processes. The TSP-30555SS is equipped with powerful 3-axis motorized stage that allows for precise wafer loading and wafer positioning. The unit also has an optional air knife that helps to minimize debris generation, a gate valve that maintains a rapid reaction and temperature control during the etching process, and a turbo pump that helps to keep the chamber pressure low. Its advanced load lock also allows for fast wafer reloading and easy maintenance. In terms of safety, TOKYO ELECTRON Telius TSP-30555SS has several built-in features that improve operator safety. It comes with an automated security door and wafer identifying system and an emergency system that allows for fast shut-down of the etcher in the event of an emergency. The unit also has several safety devices such as an interlock system, dry-film protection, and an ionizer, which help to reduce the potential for contamination and damage to the etching chamber. TEL / TOKYO ELECTRON Telius TSP-30555SS also offers user convenience features including a graphical user interface (GUI) for easy operation and data management, user-friendly monitoring and calibration tools, and a built-in device manager. It also has interfaces for external signal inputs and outputs, allowing increased flexibility when it comes to controlling the parameters and processes. In addition, the unit is equipped with Ethernet and RS232 connection, which allows users to connect to network systems as well as remote monitoring and control. Overall, TEL Telius TSP-30555SS is a powerful etcher/asher with an ample range of features and flexibility. Its chamber can accommodate a variety of etching processes and its safety features, user-friendly design, and external interfaces provide users with the ability to work both efficiently and effectively.