Used TEL / TOKYO ELECTRON Telius #293824453 for sale

TEL / TOKYO ELECTRON Telius is an advanced etcher/asher, designed for high performance dry etching. This equipment is ideal for research and development of MEMS, compound semiconductors, and other materials. This high-precision etching system is optimized for use in sub-microscale processing and deposition of materials. With its advanced PLC (Programmable Logic Controller) and FEAST (Field Effect Asynchronous Selective Transfer) technologies, TEL Telius etcher/asher provides automated and precise etch and deposition processes. TOKYO ELECTRON Telius is a compact design with an open-access platform and ergonomic digital control panel. It offers precision temperature control with a highly accurate low power quartz substrate heater, as well as precise control of gas delivery and pressure control for optimized surface cleanliness and etching. It also offers a variable velocity range with adjustable parameters for etch and deposition thickness. Telius is equipped with multiple standard safety features, including fire and gas safety systems, automatic shut-off, and low-flow sensors. Additionally, this unit offers protective shielding to minimize exposure to hazardous materials. This machine also features a Peltier water chiller, to ensure low temperatures as required for micro and nanoscale processing. The high-powered TEL / TOKYO ELECTRON Telius is designed to address the multi-dimensional, high-surf mobility, and low-temperature processing requirements of contemporary materials. It offers a high-efficiency vacuum tool and ultra-stable chamber design, providing the highest level of etching and deposition accuracy and uniformity. TEL Telius is further equipped with specialized C-Vac™ technology, a unique vacuum-based process that maintains and promotes superior cleaning and etching capabilities. The etcher/asher utilizes a custom built-etcher/asher chamber design, which enables uniform ion distribution and uniform etching performance. In conclusion, TOKYO ELECTRON Telius is an advanced etcher/asher asset, optimized for use in sub-microscale processing and deposition of materials. It offers precise temperature control, variable velocity range, and multiple standard safety features, allowing for a safe and reliable etching and deposition process. The model is further equipped with specific C-Vac™ technology, providing superior etching and deposition performance. Telius is a high-powered etching equipment ideal for research and development of MEMS, compound semiconductors, and other materials.