Used TEL / TOKYO ELECTRON Telius #9017825 for sale
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ID: 9017825
Wafer Size: 12"
Etcher, 12"
Includes:
Make / Model / Description
TEL / TOKYO ELECTRON / Telius DT / Mainframe
TEL / TOKYO ELECTRON / Telius AC Rack / AC Rack 1
TEL / TOKYO ELECTRON / Telius AC Rack / AC Rack 2
KOMATSU / FRV-6000-6 / Chiller A low
KOMATSU / FRV-6000-6 / Chiller B low
KOMATSU / FRV-6000-6 / Chiller C low
KOMATSU / FRV-6000-6 / Chiller D low
KOMATSU / FRV-6000-6 / Chiller A controller
KOMATSU / FRV-6000-6 / Chiller B controller
KOMATSU / FRV-6000-6 / Chiller C controller
KOMATSU / FRV-6000-6 / Chiller D controller
TEL / TOKYO ELECTRON / SCCM DT / Process ship A
TEL / TOKYO ELECTRON / SCCM DT / Process ship B
TEL / TOKYO ELECTRON / SCCM DT / Process ship C
TEL / TOKYO ELECTRON / SCCM DT / Process ship D
Mainframe:
Loader module
(5) Loader port units
Process ship (PM + LLM + GB): 4
(4) Process modules
(4) Gas boxes
(5) Water leak detectors (LM:1, each PS)
Controller
Turbo Molecular Pump (TMP)
Chiller: Re-circulating coolant to maintain temperature
Support equipment:
(2) Power racks
(8) RF Generators
(2) AC Power supplies
(4) TMP Controllers
(4) I/O Boxes
(4) Water leak detectors
(4) Chillers
Does not include:
(4) PM Dry pumps
(4) LLM Dry pumps.
TEL TEL / TOKYO ELECTRON Telius etcher is one of the most advanced etching systems available today. It is an automated, plasma-enhanced, multi-stage etching equipment that offers precise control of every step of the etching process. TEL Telius etcher uses a unique, proprietary combination of chemical etching, photoetching, and plasma etching technology for a precise, repeatable finish. This allows the user to accurately control the etch depth, profile, and efficiency. The etcher also features a range of custom process parameter settings to meet specific needs. The etcher is also expandable, allowing additional tools and accessories to be integrated into the system. With these expandable features, it makes it possible to etch a wider range of materials, ranging from conventional PCBs to more complex forms such as blind and buried Vias, HDI Layers, and stacked Micro-Vias. The etcher also offers a wide range of other features, such as a programmable recipe library and a monitoring unit to monitor processes and inspect finished products. Another important feature is that the machine is designed to be operator friendly, making operation and maintenance simple and easy. The tool also features advanced temperature control and safety features. It is protected with safety interlocks that prevent dangerous situations and accidents. It also offers an integrated camera asset that can be used to inspect finished products, ensuring that your etching process is of the highest quality. The model has also been designed to be environmentally friendly. Its non-exhaustive exhaust equipment and zero-downflow designs allow it to minimize emissions into the environment. It also features an air recycling system that reduces energy consumption and saves on operational costs. TOKYO ELECTRON TOKYO ELECTRON Telius etcher can be used to etch a wide variety of materials, ranging from conventional PCBs to complex forms, and is an ideal choice for manufacturers seeking reliable and repeatable etching processes. Its features and expandability make it a powerful tool that can be used to maximize efficiency and optimize the finished product.
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