Used TEL / TOKYO ELECTRON Tellius JIN #9399574 for sale

TEL / TOKYO ELECTRON Tellius JIN is a state-of-the-art etcher and asher equipment used in semiconductor device manufacturing. This system has been designed to create precise patterns on wafers in order to produce high-quality integrated circuit (IC) components. The JIN is a collection of integrated tools for semiconductor device manufacturing, ranging from etching and ashing tools to chemical management tools. The JIN's etch tools use an inductively coupled plasma (ICP) to swiftly and accurately transfer patterned masks from the wafer surface onto the underlying device layers. This process eliminates material residue, improving device performance and reliability. The JIN also supports multiple etching techniques, including deep trench, standard force, and sequential etching. All techniques are optimized for efficiency and accuracy, and the unit is capable of performing complex etch profiles with a uniform depth resolution. The ashing tool of the JIN is a highly efficient and precise tool for the removal of material from wafers and device surfaces. Using a combination of Plasma Enhanced Chemical Vapor Deposition and Microwave-Editor-Plasma (MEP) technology, the machine is capable of efficiently removing material while leaving behind a solid layer of protective polymer. This layer helps to protect the device against oxidation, keeping performance high and preventing material contamination. The JIN also has a powerful Chemical Management Tool (CMS) for the precise control of liquid chemicals. The CMS ensures that only the highest quality chemicals are used in the etching and ashing processes, and the asset can precisely monitor and adjust the concentration of chemicals to maximize process performance. With its advanced auto-tune and calibration capabilities, the CMS ensures a consistent chemical behavior, making sure that etching and ashing processes are precise and repeatable. TEL Tellius JIN is a reliable, precise, and efficient etching and ashing model for the semiconductor industry. Its advanced technology and powerful tools provide a meaningful increase in device quality and yields, and the equipment ensures precise control over chemical management, etching and ashing processes. With its high level of accuracy and repeatability, the JIN is an essential tool for modern semiconductor device manufacturing.