Used TEL / TOKYO ELECTRON Trias ALD #9294449 for sale

ID: 9294449
CVD System, 12" Process: TiN 2013 vintage.
TEL / TOKYO ELECTRON Trias ALD (Atomic Layer Deposition) is an etcher and asher that is used to create thin films with precise thickness and coverage across a surface. It is designed to deposit thin films with a range of thickness from only one atomic layer up to several hundred nanometers, allowing for precise thin film deposition on a molecular level. TEL Trias can handle a variety of different deposition tasks. It offers a high level of precision and accuracy through its level of controls which includes temperature, speed, direction, and time. TEL Trias ALD is equipped with a number of controllers, allowing precise and consistent operation. The loadlock feature allows for the loading and unloading of wafers without the introduction of contaminants into the equipment. It also has a multi-axis motion controller which helps to ensure repeatable motion and precise positioning of the wafers. The Trias also includes a powerful exhaust and scrubbing system which helps to achieve a higher level of purity in the deposition process. TOKYO ELECTRON Trias is equipped with an advanced ALD gas panel for precise control of gas flow, temperature, and pressure. This unit also includes a temperature controller which monitors and automatically adjusts the temperature of the wafer during deposition, ensuring uniformity and quality. TOKYO ELECTRON Trias ALD is also designed with safety features such as a closed cabinet and key lock which ensures against unauthorized access. It also features an emergency shutoff switch as well as automatic shutoff in case of machine failure. Overall, TEL / TOKYO ELECTRON Trias is an advanced etcher/asher that is equipped with a range of features and functions to guarantee precision thin film deposition at the microscopic level. It is designed for precise and repeatable deposition processes, offering a high level of purity and uniformity. This tool is ideal for the deposition of advanced thin film materials in the semiconductor, plastic packaging, and medical industries.
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