Used TEL / TOKYO ELECTRON Trias LPA #9161871 for sale

TEL / TOKYO ELECTRON Trias LPA is a chemical-mechanical planarization (CMP) etcher and asher designed for wafer processing. This machine is capable of up to 850 wafers per hour and produces extremely high precision in terms of planarization. TEL Trias LPA utilizes a rotary table containing four wafer bowl fixtures. The first of these fixtures allows a wafer to sited securely while another chemically removes any unwanted features. The sub-micron particle liquid slurry is used in conjunction with a brush tool to provide uniform polishing of the wafer's surface. The second fixture enables an ultrasonic rinsing process with a separate cycle of the particle liquid slurry for a thorough clean. The third fixture is used in a lithography process, which uses a light-sensitive photoresist. The photoresist is exposed to a specific light-source to create a desired pattern. The fourth fixture is a tunnel rinser which is used to rinse off the photoresist and any other unwanted residues. The advanced control systems of this machine allow for a wide range of process parameters such as chamber temperature, pressure, and slurry flows to be controlled to an accuracy of up to 1 micron. Additionally, TOKYO ELECTRON Trias LPA includes a unique lifting mechanism which allows for both the wafer bowl and brush tools to be adjusted in height. This feature eliminates the need for manual adjustment and limits the loss of wafer material during polishing. Trias LPA is an extremely reliable piece of equipment with consistent results over long-term operation. Its robust construction ensures a long working life and its built-in safety features guarantee the safety of the operators. This machine is an ideal choice for manufacturers looking for a reliable and cost-effective etcher and asher for their wafer processing needs.