Used TEL / TOKYO ELECTRON Trias MU SPA #9267460 for sale

TEL / TOKYO ELECTRON Trias MU SPA is a highly advanced etcher / asher designed for semiconductor and MEMS processing. It uses state-of-the-art technology such as 500 MHz RF power, time-of-flight secondary ion mass spectrometry (TOF-SIMS), and low energy beam deposition (LEBD) to deliver precise etching results. The machine features a standard wafersize of 6 inches, allowing for high-precision patterning for a wide range of applications including circuit boards, MEMS devices, sensors, and other microelectronic components. The etcher / asher is also equipped with a dielectric layer deposition chamber as well as an in-situ optical alignment equipment. TEL Trias MU SPA utilizes a multi-pass etching process that ensures accurate results using a combination of reactive ions, depositing thin layers of pre-defined silicon dioxide and silicon nitride during the process. The etcher / asher also features a multi-chamber system which enables it to improve the results of the etching process by allowing different gases to be used for each etching phase. TOKYO ELECTRON Trias MU SPA also features several cutting-edge safety capabilities, such as advanced ion source control systems, a vacuum interlock unit, and a comprehensive hardware protection machine that monitors and prevents accidental drive damage. This ensures a safe and efficient operation without compromising on the quality of the results. Trias MU SPA is well suited for use in microelectronic applications as it offers high precision etching and deposition processes as well as superior safety features. It is an ideal choice for a wide range of semiconductor and MEMS-related projects.