Used TEL / TOKYO ELECTRON Trias SPA #9277487 for sale

TEL / TOKYO ELECTRON Trias SPA is a highly advanced etcher, also known as an asher, designed for the most exacting advanced lithography and imaging applications. This etcher is designed for a high degree of chemical control and incorporates the latest advances in vacuum chamber construction. It provides an exceptionally clean and stable etching environment, which is critical to the most efficient and precise etching of advanced photomasks and devices. TEL Trias SPA etcher offers a wide range of process control capabilities allowing ultra-low kV exposure, tight control over etching temperature, and superior monitoring of process parameters. These process control capabilities enable an etching process which is fast and efficient, while also producing outstanding image and device results. The body of the etcher is constructed with ultra high purity aluminum to ensure tight seals and minimal chemical exposure to components. The etcher is designed with a proprietary triple-coat layer insulation to eliminate the potential for contamination. Its chamber temperature is tightly controlled to +/- 0.2°C to reduce aberrations in etching processes, and to provide an optimum environment for etching. The etcher also utilizes a unique multi-pressure architecture to further isolate the inside of the etcher from outside sources of contamination. TOKYO ELECTRON Trias SPA etcher also provides a wide range of specialized metrology tools for imaging and measuring chip and device features. These tools include an ultraviolet laser interferometer, a scanning electron microscope, and a range of optical microscopes and gyroscope measuring systems. This allows precise imaging and metrology of chip features during etching processes. Trias SPA etcher is an advanced etching solution for any lithography or imaging application. Its advanced process control capabilities, ultra-high purity chamber construction, and sophisticated metrology tools make it a reliable and efficient tool for achieving high-quality etching results.