Used TEL / TOKYO ELECTRON Trias SPA #9284152 for sale

TEL / TOKYO ELECTRON Trias SPA is an automated etcher/asher process, designed for both physical and electronic device fabrication. The process enables manufacturers and engineers to precisely pattern a variety of surfaces with minimum feature sizes down to 10 nanometers, and has the flexibility to process organic, inorganic, and polymer materials. The equipment consists of three major components: the chamber, the plasma source, and the control electronics. The system's vacuum-based process chamber, the heart of the unit, is designed with advanced exhaust, evacuation, and gas distribution capabilities, enabling a wide range of processing applications. The output of the plasma source that is attached to the process chamber enables various plasma etch chemistries, while the machine's control board allows for precise and repeatable process recipes for superior product yields. TEL Trias SPA includes a variety of features that help ensure optimal process control and performance, such as a sophisticated wafer PLC control tool for automatically defining the constituent steps of the etch process. Additionally, the asset includes a variety of useful auxiliary functions, such as real-time data acquisition, alarm data monitoring, and automatic process recipe adjustment, helping to maximise process performance. The model also includes a range of graphical monitoring interfaces, which aid engineers in the process development and qualification stages of semiconductor device fabrication. The equipment's advanced pressure-measuring capabilities, combined with its real-time graphical interface, enable the efficient adjustment of processing parameters for precise and repeatable etching results. To ensure consistent performance and reliability, TOKYO ELECTRON Trias SPA is designed to minimise breakdowns and maintenance costs. This is attained through the application of advanced control systems, strong magnetic chucks, corrosion-resistant heaters, and specialised vacuum pumps. Overall, Trias SPA etching system is a powerful and reliable device fabrication tool that provides a cost-effective solution for the etching of a variety of surfaces with small feature sizes. Its flexibility, precision, and ease-of-use make it an indispensable tool for semiconductor device fabrication.