Used TEL / TOKYO ELECTRON Trias SPA #9294450 for sale

TEL / TOKYO ELECTRON Trias SPA is an advanced etching / ashing machine used in the semiconductor industry. It was designed to provide superior process control and reliability to help manufacturers ensure highest yields. TEL Trias SPA features several key components and advanced capabilities. The advanced chamber design creates a stable high-vacuum environment so users can achieve the fastest etch rate without compromising any of the process parameters, such as temperature or gas flow. The low friction chuck, gate valves, and advanced load port provide improved temperature control and safety features, while the beam line guides ensure maximum uniformity across the wafer. These features allow users to achieve the highest uniformity with the shortest etching time. The high-accuracy of TOKYO ELECTRON Trias SPA makes it ideal for etched feature or pattern sizes that require exact, repeatable results. The equipment is available with photoresist thickness monitoring, which enables users to better understand the accuracy of their etching job, enabling them to adjust recipes and increase yields. Trias SPA also features a comprehensive package of advanced software. The Digital Recipe Management system allows users to easily manage recipe library, and can even be integrated with a facility's command and control unit. The Advanced Process Control machine automatically compensates for variations in process parameters, while the integrated Co-simulation tool allows users to evaluate after-effects of a process before its execution. The advanced, automated chamber cleaning feature uses a three-stage chamber cleaning asset with individually-addressable chambers and ensures faster recovery times and high cleanliness for wafers. TEL / TOKYO ELECTRON Trias SPA is an advanced etching machine for the semiconductor industry. Its robust features ensure superior process control, high accuracy, uniformity, and repeatability, as well as shorter etching times. TEL Trias SPA helps users increase yields by providing a comprehensive suite of advanced software, featuring Digital Recipe Management and Advanced Process Control systems, as well as an automated chamber cleaning model.