Used TEL / TOKYO ELECTRON Trias TI/TIN #293689275 for sale

TEL Trias TI/TIN is a high precision etcher and asher used in semiconductor fabrication. It is capable of etching and ashing with a wide range of working materials such as silicon, silicon dioxide, atomic level metals, and even multi-layers of nanomaterials. TOKYO ELECTRON Trias TI/TIN performs etching and ashing with induction and thermal fields known as tri-field technology. This combination of induction and thermal fields allows precise control over the amount of etch, reducing any undesirable side effects that may otherwise occur. Operating temperature is monitored and controlled for maximum uniformity, enabling precise etching and ashing of a wide range of materials. The machine is also capable of stable, repeatable performance thanks to its advanced temperature control. TEL / TOKYO ELECTRON Trias TI/TIN features a 6-inch wafer loading capacity, and can accommodate up to four different etchant gasses. It also includes a gas imaging feature, allowing users to optimize reactive ion etching conditions based on gas analysis. Process data can be stored for recall at a later time, offering repeatable and reliable performance, saving time and resources. TEL Trias TI/TIN features a simple user interface for easy operation and enables remote monitoring via a personal computer and touchscreen. The machine can be monitored and operated from a remote location, allowing users to access data and perform operations from virtually anywhere. In summary, TOKYO ELECTRON Trias TI/TIN is a high precision etcher and asher used in semiconductor fabrication. It offers efficient repeatable performance and a wide range of compatible materials, temperature control and easy operation with remote monitoring options. This machine is an ideal choice for a range of applications in semiconductor manufacturing.