Used TEL / TOKYO ELECTRON Trias Ti/TiN #293802348 for sale

TEL Trias TI/TIN is an etcher/asher designed for use in semiconductor applications. It is a multi-functional tool that can be used for etching, annealing, and pre-cleaning processes. The Trias TI/TIN utilizes an electron beam to generate a partial vacuum and provide a high degree of control over the etching process. Its precision and repeatability provide consistent, high-quality etching results. The tool features low particle density control to minimize the risk of particles on the substrate. The Trias TI/TIN offers a variety of etching capabilities including RIE (Reactive Ion Etching), e-beam physical vapor deposition (e-PVD) and deep reactive ion etching (DRIE). Its powerful etching capabilities allow it to quickly and accurately remove material from delicate substrates. The process allows for maximum control over etching parameters such as temperature, recipe, and alignment. Additionally, the Trias TI/TIN can be used to deposit metal and other materials onto substrates. Aside from etching, the Trias TI/TIN can also be used for annealing. It can be used to modify the physical and chemical properties of the substrate as well as smoothing and densifying the surface. This process also helps to reduce chip failures due to excessive material strain. Additionally, the Trias TI/TIN can be used for pre-cleaning substrates. This process eliminates contaminants on the surface of the substrate to ensure optimal results. In conclusion, TOKYO ELECTRON Trias TI/TIN is a highly advanced etcher/asher ideal for use in semiconductor applications. Its high precision and repeatability allow it to achieve accurate etching results while its multi-functional capabilities specific to etching, annealing, and pre-cleaning provide added value. Additionally, its low particle density control helps to reduce the risk of contamination.