Used TEL / TOKYO ELECTRON Trias TI/TIN #9212676 for sale
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TEL Trias TI/TIN is an etcher / asher equipment designed to meet the needs of various industries. It is capable of etching and ashing a wide variety of materials including copper, aluminum, stainless steel and silicon. The system consists of a high-performance electron beam source, a vacuum chamber, a sophisticated control unit and an array of applications-specific support systems. The electron beam source of TOKYO ELECTRON Trias TI/TIN is capable of producing energies up to 50kV and is equipped with an adjustable deflector setting. This allows for precise etching with no waste of material. The vacuum chamber provides optimum performance and maximum etching precision by keeping the beam and the chamber environment clean. It includes a temperature controller, automated safety shutdown, and adjustable grid setting. The control machine of TEL / TOKYO ELECTRON Trias TI/TIN is designed for ease of operation, as well as offering precision control over the etching process. It contains a comprehensive set of user interfaces for process setting and monitoring. It also includes a Graphical User Interface (GUI) for easy programming and optimization of scripts. A variety of data acquisition and diagnostic software packages are available for analysis of etch results. The tool is designed for flexible capacity by providing applications-specific support systems for batch and single-step etching, ashing and delineation of materials. TEL Trias TI/TIN offers a wide range of process parameters for etching, from high-temperature and ultra-fast etching to low-temperature and low-pressure etching. It utilizes an ultra-high-definition imaging asset for superior line size and dielectric wall widths control, as well as for fine feature manufacturing. TOKYO ELECTRON Trias TI/TIN is designed for use in the semiconductor, medical device, MEMS, and PCB industries. It is a reliable, efficient tool for etching intricate shapes, profiles, and features in a range of materials. The model is capable of producing high-quality results with short cycle times and minimal waste.
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