Used TEL / TOKYO ELECTRON Trias TI/TIN #9253817 for sale

TEL Trias TI/TIN is a state-of-the-art etcher / asher for semiconductor processing. It employs deep reactive ion etching (DRIE) technology to produce items with very high accuracy and repeatability. It is primarily used in the semiconductor industry for applications such as sub-100nm feature size generation. The etching process itself is conducted in a vacuum chamber. The process gases, Which are selected based on the task at hand, are introduced into the chamber along with the specimen. During the process, electric fields and explosions from inside the chamber create an etching environment. This environment interacts with the process gases and the specimen to etch, anneal and deposit material in a highly precise order, resulting in two-and three-dimensional structures with patterned etch profile. TOKYO ELECTRON Trias TI/TIN is equipped with a graphite susceptor, protecting the item to be etched and ensuring that the temperature is maintained at an optimal level. This system ensures that the items remain highly-stable with very little flicker and therefore enables high-precision etching and annealing. The system is also equipped with an automatic wafer handlers which makes it possible to etch and anneal multiple items simultaneously. The handlers are capable of accurately placing and moving the specimen in different directions to allow for a full range of etching processes. TEL / TOKYO ELECTRON Trias TI/TIN comes with a 3 micron resolution and has been the mark of success for TEL in the wafer processing industry. It is also equipped with an array of safety functions such as ozone safety interlock mechanism, which protect the wafer from ozone leakage. In summary, TOKYO ELECTRON Trias TI/TIN is an etcher/asher that is highly accurate, repeatable and reliable, allowing users to generate high-precision two- and three-dimensional structures. It is equipped with a graphite susceptor, automatic wafer handlers, 3-micron resolution, and an array of safety functions, which ensure that the items remain in a highly stable condition and protect them from ozone leakage.