Used TEL / TOKYO ELECTRON Trias TI/TIN #9253877 for sale

TEL Trias TI/TIN is a high-capacity, automated etcher that combines multiple etching and stripping technologies to provide smooth, high-quality etching for a wide variety of resist and substrate materials. TOKYO ELECTRON Trias TI/TIN equipment features advanced layers of stiction-resistant and electromagnetic protection which ensure reliable and high-capacity etching without compromising quality. It supports arbitrary process plans with its Shape Wizard software and significantly reduces downtime with its robust and reliable PECVD monitor. TEL / TOKYO ELECTRON Trias TI/TIN etcher is equipped with two plasma sources, a biased source providing the 50mA of ion current and an unbiased source for tunable etching power. Each source has independently adjustable plasma parameters and temperature, allowing for optimal control while etching. This allows for a high-quality etch and good selectivity between dissimilar materials, making TEL Trias TI/TIN a popular choice for many. It also supports a wide range of input and output voltage parameters, allowing for direct compatibility with medical and semiconductor devices. In addition, the process chamber of TOKYO ELECTRON Trias TI/TIN is built robustly to reduce contamination and decrease reaction chamber drift associated with temperature and pressure fluctuations. The chamber can also be easily opened, cleaned, and adjusted for different etch applications. It also includes an additional mini-shutter chamber for strip and HF pre-clean processes and special processes related to sputter etch for high-rigidity materials. The overall control system of TEL / TOKYO ELECTRON Trias TI/TIN is also quite powerful and includes not only Shape Wizard, a graphical user interface designed for easy job programming and etch pattern recognition on thinfilm patterns, but also a variety of other control components. The unit includes an automatic-adjustment time setter, ESC key, a multi-language support menu, as well as a control setting window and alarm window to help you monitor the process. In addition, it also includes ECO mode, which helps to keep etching costs low by optimizing load on the plasma sources, and an OVLF (overload protection) machine that automatically shuts down the power sources if they exceed their programmed limits. In conclusion, TEL Trias TI/TIN is a highly reliable etcher, designed for maximal efficiency and optimal results. Its advanced features, such as its versatile plasma sources, its robust process chamber, and its powerful control tool, make it an ideal choice for a variety of etching applications.