Used TEL / TOKYO ELECTRON Trias TI/TIN #9294366 for sale

TEL Trias TI/TIN is a high-performance etcher/asher designed for the semiconductor manufacturing industry. It is capable of delivering high-quality, uniform etching/shadowing on all types of materials, including silicon, glass, polysilicon, and quartz. The etcher/asher employs a equipment of reliable, standard-defining etching/shadowing processes. It includes a programmable control system with advanced software developed by TOKYO ELECTRON that enables repeatable, high-quality results. The etcher/asher consists of a heated substrate plate, a focusing lens, a nozzle for etching/shadowing, a plasma generator, and a substrate temperature monitor. It is equipped with a Peltier cooling unit to ensure the substrate is correctly maintained and cooled down after etching/shadowing. The etcher/asher features high accuracy and repeatability, as well as adjustable beam velocity and angle for optimized etching/shadowing. The machine is equipped with a vacuum pump to keep the etching/shadowing environment clean and dry. It is also fitted with a dedicated exhaust tool which ensures any expelled particles are removed from the workspace. The asset is also equipped with an accurate etching/shadowing monitor, which keeps track of the etching/shadowing process and notifies users when the process is complete. The etcher/asher also supports multiple types of etching/shadowing, such as anisotropic, isotropic, and blanket etching/shadowing. In addition, the model can handle patterned etching/shadowing and has the capability to etch/shadow over large areas. Finally, the equipment includes power management, ion beam deposition and wafer protection features, making it a reliable and versatile etcher/asher for industrial applications.