Used TEL / TOKYO ELECTRON Trias TI/TIN #9294475 for sale

ID: 9294475
Wafer Size: 12"
Vintage: 2004
CVD System, 12" 2004 vintage.
TEL Trias TI/TIN is an etcher/asher designed for semiconductor applications. It is a hot plate type of machine which can perform many precision etching and stripping processes with quick turnarounds. The machine is composed of four chambers; etch, strip, transfer, and an exhaust chamber. The etch chamber contains the etching unit, where a silicon substrate is immersed in etching liquid for patterning. The strip chamber contains the etching liquid cleaner, where the substrate is exposed to ultrasonic vibration that removes etching residue from the substrate. A vacuum is generated in the strip chamber to remove the etching liquid together with the generated residue. The transfer chamber is used to transport the substrate between the etch and strip chambers, while the exhaust chamber is used to remove generated fumes from the chambers. The machine is equipped with an advanced control equipment to provide users with superior functionality and flexibility when setting up the parameters for their etching and stripping processes. The operator can use the control system to adjust etching time, etching temperature, etching pressure, and etching solution concentration. The user can also use the unit to set the temperature, pressure, and dry time of the strip chamber and transfer chamber. In addition, the machine allows the user to store etching recipes created for specific substrates and processes which can be retrieved and used at any time. The tool also monitors the process parameters and provides feedback to the user. TOKYO ELECTRON Trias TI/TIN has several safety features to ensure proper operation and prevent accidents. A grounding asset is incorporated which eliminates static electric charges and provides a measure of safety during the etching and stripping process. The model also prevents operators from entering etching and strip chambers by making sure the chambers are properly locked when in use. An alarm equipment is installed which will sound if any of the process parameters drift outside of their established range, alerting the operator to correct them. TEL / TOKYO ELECTRON Trias TI/TIN provides a high level of precision and a quick turnaround when etching and stripping chips. It is designed for semiconductor applications and is highly reliable and efficient, making it an excellent machine for industrial production.
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