Used TEL / TOKYO ELECTRON Trias W #9222545 for sale

TEL / TOKYO ELECTRON Trias W is an etcher and asher equipment designed for semiconductor device fabrication. It combines batch etching and simultaneous ashing capabilities in a single platform, enabling manufacturers to achieve greater process control in their production cycle. This makes TEL Trias W ideally suited for a wide range of production processes, from high-volume single product runs to lower-volume more complex device construction. At its core, TOKYO ELECTRON Trias W utilizes a large reaction chamber to house the wafer being processed. This chamber works in tandem with a chemical delivery system to inject reactive species into the chamber, exposing the wafer to a reactive atmosphere. As the wafer is exposed to this atmosphere, etching and ashing occur in precisely controlled ratios. This ensures that etching and ashing occur at the same rate, providing manufacturers with complete control over the end product. Trias W is also equipped with advanced process control features, allowing it to adapt to different production needs. It includes a wide range of parameters for controlling pressure, temperature, flowrate, gas species, and more. This ensures that the etching and ashing occurs precisely as intended. TEL / TOKYO ELECTRON Trias W is also designed for flexibility, allowing for multiple configurations to meet specific device requirements. It can be customized with different plate sizes, or with the addition of extra process chambers and wafer transfer arms. This allows manufacturers to reduce process times and maximize the accuracy of their device construction. In addition, TEL Trias W is equipped with a number of safety features to protect both the unit and the operators from any potential accidents. This includes built-in safety machine monitors and alarms which detect any problems and shut down the process accordingly. TOKYO ELECTRON Trias W is a powerful and flexible etcher and asher tool with the capacity to handle high-volume production processes. Its process control capabilities, customizable configuration options, and safety features make it an ideal choice for semiconductor device manufacturers who need reliable and accurate results.