Used TEL / TOKYO ELECTRON Trias #293609735 for sale

TEL / TOKYO ELECTRON Trias is a large-scale etcher / asher machine that is used for a variety of microelectronics processing applications. This versatile piece of equipment is used for the oxide stripping and etching of semiconductor wafers, as well as for the etching of metals and other materials. TEL Trias features high-speed features, wafer handling flexibility and advanced safety features. Its large platform can accommodate up to six 200 mm (8 inch) wafers per cycle, and its high-speed CF4/O2 reactive-ion etching (RIE) ensures fast and consistent results. Additionally, TOKYO ELECTRON Trias offers a host of user-friendly options, including an intuitive touch screen interface with jog-wheel, variable pump down and limited pressure control, three temperature zones, and on-the-fly switching of etch process. This etcher / asher is also highly reliable, with world-leading quality and long-term reliability, thanks to its robust and sealed stainless-steel chamber, as well as its triple shield design. Furthermore, Trias also offers state-of-the-art safety features, such as dual interlocks, a suite of sensor types, and an auto-opening safety gate. This results in enhanced safety for users and operators. All in all, TEL / TOKYO ELECTRON Trias is an extremely versatile and reliable etcher / asher that meets the exacting needs of the semiconductor, industrial and electronics industries. With its high speed, advanced cooling, process automation and safety features, this etcher / asher enables precise and precise microelectronics processing. As a result, TEL Trias is an ideal solution for a wide range of wafer-level applications.