Used TEL / TOKYO ELECTRON Trias #293652308 for sale

TEL / TOKYO ELECTRON Trias is an etcher/asher designed and manufactured by TEL (TOKYO ELECTRON) Corporation. It is a high-precision etching and ashing device used to create tiny openings in thin film layers and patterns in the etch layers of semiconductor chips, microelectromechanical systems (MEMS) structures, and integrated circuit (IC) structures. TEL Trias is an Iterative Etching and Ashing Equipment (TEARS) with improved accuracy and precision compared to traditional dry etchers and ashers. It utilizes an advanced semiconductor etching/ashing process that enables highly precise etching, ashing and cutting operations. The system features an improved high-throughput process time control that allows it to produce consistent etch profiles and precise patterns in the etch layers. This unit also incorporates precise positioning control over the etching head, making it possible to accurately position the etching head over the substrate surface. In addition, TOKYO ELECTRON Trias also features integrated wafer handling capabilities such as wafer-level temperature control, precise wafer lining and spacer placement, and precise wafer rotation and loading. This makes the machine capable of integrating etching, ashing and precise patterning tasks into single tool operations, eliminating the need for additional machining processes and allowing optimization of the etching and ashing processes. Trias also incorporates a low-pressure rotary anodic oxidation (RRO) etching process, that enables more precise etching profiles and higher etching quality while eliminating etching damage. Additionally, TEL / TOKYO ELECTRON Trias features improved process control with precise humidity, temperature and oxygen concentration control in the etching chamber, resulting in higher etching quality and higher yield for the same etch time. TEL Trias also features improved safety and operational features such as enclosed robotics, motion controls, shutter valves and load/unload equipment that result in improved safety and increased user safety. Furthermore, TOKYO ELECTRON Trias is also certified by ISO 14001, ensuring the quality of the asset's performance. By combining advanced etching and ashing technologies, Trias is an ideal etcher/asher for semiconductor chip, MEMS structure, and IC structure production. It offers improved accuracy, precision and safety, making it the ideal device for advanced etching and ashing tasks.