Used TEL / TOKYO ELECTRON Trias #293677520 for sale
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ID: 293677520
Vintage: 2006
Metal CVD system
Process: Ta₂O₅
(2) Chillers
(3) Chambers
Loader
Waste gas treatment system
Uninterruptible Power Supply (UPS)
2006 vintage.
TEL / TOKYO ELECTRON Trias is an etcher, or asher, used in the semiconductor microfabrication industry for creating integrated circuits. TEL Trias uses a highly accurate plasma-enhanced chemical vapor deposition (PE-CVD) process that offers superior controllability, repeatability, high-level process flexibility, and high-volume throughput. In order to ensure that the results are accurate and consistent, TOKYO ELECTRON Trias incorporates real-time data feedback and wafer motion measurement with its intelligent control systems. Trias is particularly effective when it comes to gap filling, with its proven enclosed gap-fill-mode deposition, which enables it to fill deep pores and extremely narrow gaps with high-precision deposition. Aside from gap filling, TEL / TOKYO ELECTRON Trias can be used for complex etching, such as etching the high aspect-ratio structures necessary for creating transistors, capacitors, and other basic circuit components. The enclosed structure of TEL Trias reduces chemical exposure, making it not only more effective but also safe. TOKYO ELECTRON Trias also features an advanced process control (APC) system that provides real-time process monitoring and control. This system allows for automated optimization of etch parameters, ensuring that the process is always running optimally. Additionally, Trias is equipped with chamber activities such as shutter, wafer transfer, and sample exchange, which make it easy and safe to operate. TEL / TOKYO ELECTRON Trias is ideal for use in high-volume production environments, where consistent performance, reliable process management, and high-throughput are essential. With its advanced features and proven track record, TEL Trias is a dependable tool that can help semiconductor manufacturers produce integrated circuits of the highest quality.
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