Used TEL / TOKYO ELECTRON Trias #293689274 for sale

TEL / TOKYO ELECTRON Trias is an etcher / asher that utilizes inductively coupled plasma (ICP) technology to accurately etch a wide range of materials such as quartz, glass, silicon wafer, and metal. TEL Trias is an advanced etching equipment comprised of multi-process modules and has the capability to perform both standard etching and fine pattern etching which requires accurate control of thickness and repeatability. The ICP source of TOKYO ELECTRON Trias incorporates a high frequency voltage generator and a large glass enclosure containing inert gases such as argon, hydrogen, and helium. The ICP source is used to create a plasma with controlled energy level, temperature, and pressure, allowing precise etching of a wide variety of materials. The software interface of Trias can be easily customized to the customer's specific needs. It includes a wide range of process parameters and built-in parameters that can be adjusted and modified as needed. TEL / TOKYO ELECTRON Trias also features a uniform gas distribution system that evenly distributes the excavated material on the wafer surface, enabling uniformity of etch depth and resistivity. Its uniform temperature control unit allows precise control of the etching process, ensuring repeatability and a consistent high-quality result. The interface of TEL Trias also allows the user to track the process parameters, analyze trends, and adjust the etch process in accordance with customer-specified needs. In terms of safety, TOKYO ELECTRON Trias is designed to meet the safety regulations and requirements of the customer, as well as providing comprehensive safety features such as automatic alarms, pressure and flow monitoring, exhaust machine, and vapor recovery. In conclusion, Trias etcher / asher is an advanced etching tool capable of performing precise etching and fine pattern etching of various materials and providing excellent safety features.