Used TEL / TOKYO ELECTRON Trias #293754398 for sale

TEL / TOKYO ELECTRON Trias
ID: 293754398
Atomic Layer Deposition (ALD) systems Gas: TiN.
TEL / TOKYO ELECTRON Trias is a state-of-the-art etcher (or asher) commonly used in the semiconductor and other related industries, such as IC production and LCD panels. It is capable of etching and cleaning operations using reactive gases on tablet-shaped wafers. TEL Trias uses a combination of intelligent technologies and tools to achieve precise etching, including plasma source control, ultra-high vacuum technology and various other process technologies. TOKYO ELECTRON Trias is build with many advanced features that allows it to operate at low power and with a very high level of control, accuracy and reliability. The etcher features an advanced three beam source, a multi-servo flexible gas mixing system, a high-end temperature and pressure control systems and a customizable etching chamber. With these features, Trias can provide accurate etching for the most complex wafers and any required surface finish. The etcher includes a number of programmable functions, such as the ability to select the best etching parameters for different types of wafers, set process parameters to customize the results and create custom recipes to repeat the same etching results. Additionally, it has integrated safety mechanisms in order to ensure a safe operation. TEL / TOKYO ELECTRON Trias is a reliable production platform with easy-to-use control and monitoring systems that offers excellent performance, accuracy and reliability. It is capable of etching, cleaning and ashing of various structures and materials, such as silicon, quartz, and aluminum, offering versatility and flexibility. It is an ideal choice for the modern production facilities looking to cut time and costs, while maintaining a high standard of quality.
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