Used TEL / TOKYO ELECTRON Trias #293767140 for sale

TEL / TOKYO ELECTRON Trias is a plasma etching equipment designed specifically for device fabrication research and development, as well as production of a wide range of semiconductor devices. It is capable of etching single or multiple pattern layers in the same chamber for the fabrication of modern MEMS and related devices. TEL Trias utilizes a low-frequency plasma source to minimize etch damage on different patterns, whilst delivering an increased level of productivity. This etching system also offers a wide range of precision plasma etching capabilities, enabling fabrication of devices with high resolution and accuracy. With its improved process control and enhanced production capabilities, TOKYO ELECTRON Trias unit is an ideal choice for the fabrication of advanced semiconductor components. Trias has a number of features which make it an attractive etching machine. For example, it has an improved thermal management tool and is capable of rapid cooldown and recovery times with the help of internal heaters and coolers. Furthermore, it is equipped with an advanced Automatic Frequency Control (AFC) feature to ensure process consistency, as well as higher throughput and productivity. Additionally, the asset includes built-in diagnostics for monitoring and controlling plasma conditions in real time and to quickly recognize any potential problems. This ensures a high level of process repeatability and reliability. TEL / TOKYO ELECTRON Trias also comes with a range of dedicated etching chambers, providing different etching capabilities and offering various levels of selectivities to etch different materials. For example, dedicated chambers allow for deep etch, shallow etch and reactive ion etch. Furthermore, the model is equipped with a number of advanced components such as a multi-point bias plate and a multi-level end-point detection equipment to maximize etching quality. Finally, TEL Trias is designed to be easy to operate and comes with a range of software and user interfaces. For example, it can be controlled via an integrated touchscreen panel, enabling the user to monitor and control the etching process directly from the display. Additionally, the system is compatible with a range of software packages, allowing users to create etching recipes and evaluate etch results. Overall, TOKYO ELECTRON Trias provides reliable and repeatable etching performance for a wide range of semiconductor needs. Its advanced etching capabilities, combined with its extensive process control features, make it an ideal choice for fabrication of modern MEMS and related devices.