Used TEL / TOKYO ELECTRON Trias #293778167 for sale

TEL / TOKYO ELECTRON Trias is an advanced etcher/asher that is used to create complex patterns and different shapes in semiconductor wafers during the creation of integrated circuits. TEL Trias works in conjunction with a computer controlled stage and is capable of producing precise results with ease and accuracy. TOKYO ELECTRON Trias is used in the production of a wide range of electronic components, such as transistors, diodes, and other microelectronic components. Trias has a high-pressure batch etch equipment (HEBS) chamber that enables high-aspect-ratio etching with precise thickness control. The chamber allows for precise control of etching parameters such as time, temperature, pressure, and chemistry. For precise feature dimensioning and reproducible performance, TEL / TOKYO ELECTRON Trias utilizes a spin-on photoresist coating system for even coating and easy removal of the photoresist. TEL Trias's integrated process control unit is designed to provide powerful, real-time control capabilities. This machine monitors, calibrates, and manages process parameters, recipes, and variables within the chamber. It also helps to maintain the production quality and keep process parameters within acceptable limits. The sophisticated process control tool also allows the user to make adjustments on the fly to accommodate changes in process parameters and environmental conditions. TOKYO ELECTRON Trias is highly adaptive to today's process requirements, providing efficient, repeatable, and reliable etch processes. With high-performance etching and deposition processes, uniform surface finish, and advanced program management capabilities, Trias delivers breakthrough performance. TEL / TOKYO ELECTRON Trias is capable of discharging volumes that range from 0.1 to 150 liters and can process wafers up to 4 inches in diameter. TEL Trias also features an intelligent alarm asset for predicting, monitoring, and preventing process errors and contaminants. Overall, TOKYO ELECTRON Trias is an advanced etcher/asher that provides precise control and repeatable performance and ensures reliable results. With its high-performance etching, advanced program management capabilities and intelligent alarm model, Trias delivers reliable results with high throughput and extended lifetime.