Used TEL / TOKYO ELECTRON Trias #293821837 for sale

TEL / TOKYO ELECTRON Trias is a high-performance plasma etcher/asher for the semiconductor and other industries. It is used to etch/ashe small semiconductor structures and wafers accurately and safely. It offers an efficient, cost-effective and advanced etching/asching process with its modular design and integrated process control software. TEL Trias offers a versatile platform for various plasma etching/ashing operations. TOKYO ELECTRON Trias has been engineered to provide the highest precision etching/ashing for a variety of substrates such as single and two-sided wafers, ceramic-coated, metal-coated and quartz-coated wafers. It is capable of processing products from a wide range of material types including crystalline, poly-crystalline, ceramic, silicone, etc. It also features a very precise pressure control equipment that allows very high etch rate accuracy and repeatability, allowing for the etching of intricate processes with extremely high precision. Trias has several operational modes such as pre-sputter, sputtering, etching, and sputter/etch, as well as the ability to perform one operation at a time, or multiple operations together. The integrated process control software has the ability to monitor and order several different processes simultaneously, through a single button operation. Additionally, TEL / TOKYO ELECTRON Trias has the ability to store up to 99 pre-programmed recipe steps, allowing for optimal etching/ashing operations. TEL Trias also features a High Speed Automatic Recipe Control (HSAR) system, which provides users with quick and easy access to customizable recipes that can be used to etch various combinations of materials and wafer sizes with precision, accuracy and repeatability. Additionally, the user-friendly software has an integrated cooling unit to enable rapid cooling and prevent wafer warping. Additionally, the automated 'smart home' feature ensures all components and accessories are in the correct position for each job, eliminating time-consuming setup preparations. Finally, TOKYO ELECTRON Trias is equipped with a long-term data recording machine that records all data related to etching/ashing operations. This data can be used for plant management, process development, defect analysis, and more. The recording tool also features an event history with sequential data format, allowing users to analyze processed wafers and investigate potential problems.