Used TEL / TOKYO ELECTRON Trias #293824452 for sale

TEL / TOKYO ELECTRON Trias is a computer controlled plasma etcher-asher equipment. Designed exclusively for use in research laboratories, this system has been created for easy and accurate process optimization, enabling the user to attain desired etching and ashing profiles without compromising unit performance. Its comprehensive design incorporates features that enhance its user experience such as automatic wafer-position detection technology and a graphical user interface. TEL Trias machine is equipped with a high-performance automated etching and ashing source technology, enabling the user to gain the highest level of precision and control. Utilizing an advanced Plasma processing reactor with robust chamber components, the tool ensures uniform and high-quality results in a matter of minutes. Additionally, TOKYO ELECTRON Trias offers a wide process window of different parameters that can be adjusted with ease, providing the user the possibility to fine-tune individual process parameters for highly-detailed etch or ashing profiles. Trias has an ultra-fast source switching time that is programmable, allowing the user to switch sources in the middle of their process without any performance degradation. The asset also incorporates a vacuum sealing mechanism that prevents any gas leakage due to air infiltration or accidental lifting of the chamber. Its revolutionary wafer-position detection technology takes into consideration the wafer angle, enabling the user to achieve the best etch or ashing profile possible. For the ease of the user, TEL / TOKYO ELECTRON Trias has an intuitive touch panel display which magnifies the graphical representation of the etch/ashing process parameters, making it easier to read and understand. The model also supports OPC data, opening up tools for external device control which can streamline the current etch process. Furthermore, TEL Trias can receive programming input from a separate terminal, allowing users to perform additional source equipment manipulation and process insulation control. TOKYO ELECTRON Trias is a highly advanced and accurate plasma etcher-asher system, designed to provide a comprehensive toolset for research laboratories. With its industry-leading edge technology and support for exclusive features such as wafer-position detection and OPC data communication, Trias is an indispensable tool for any researcher looking to attain the highest level of process optimization.