Used TEL / TOKYO ELECTRON Trias #9118411 for sale

TEL / TOKYO ELECTRON Trias is a high-speed etcher/asher designed to give consistent etching results on a wide range of materials, including metals, semiconductor materials, and ceramic substrates. It utilizes advanced vacuum etching technology to enable high accuracy and repeatability. The etcher/asher can be used in a variety of applications, such as sputter etching, photoresist planarization after etchback or stop-etching, film stress relief, and forming recesses in hard-to-reach areas. The etcher/asher is equipped with a vacuum equipment that allows the etching/ashing area to be precisely controlled. It features an advanced etching chamber and a vacuum shield that maintains cleanroom levels inside the system. Furthermore, it is equipped with an optical unit and Auto-Collimation Probe (ACP) to accurately measure and set up the etching conditions. This etcher/asher is equipped with a powerful high-frequency RF generator to provide energy to etch a wide range of materials. The etching process is monitored and controlled by an integrated computer machine, which can also be used to fine-tune etching parameters according to the material being processed. The tool is also equipped with software to adjust processing parameters, measure etching rate, and compile processing results. This etcher/asher is equipped with various functions and tools that enable it to be used for a variety of applications. For example, it has a gas asset for introducing reactive gases to the etching chamber, as well as a chemical delivery model for adding chemicals during etching. Furthermore, it is equipped with a high-temp anodizing chamber that can be used to etch and planarize wafers and other materials. In terms of safety, TEL Trias has been designed with safety features such as a special emergency stop (E-STOP) feature for stopping the etcher/asher, an ozone-free exhaust equipment, and an automatic shutoff function that will turn off the RF generator in case of any compliant issues. The system also has an automatic safety unit for detecting hazardous levels of ozone. Overall, TOKYO ELECTRON Trias is a high-performance etcher/asher that is capable of achieving consistent etching results on a wide range of materials. It is equipped with advanced etching technology, safety features, and various tools for handling different etching and ashing processes, making it an excellent choice for various semiconductor device manufacturing applications.