Used TEL / TOKYO ELECTRON Trias #9158471 for sale

TEL / TOKYO ELECTRON Trias is an etcher/asher specifically designed for semiconductor device fabrication. It is used to create and modify patterns on silicon wafers, typically at sub-micron dimensions, during the wafer fabrication process. TEL Trias is a four-sided wafer etching machine which combines ultra-high-vacuum compatibility and high-speed throughput into a compact tool. Its robust construction provides a long-term process. TOKYO ELECTRON Trias is capable of temperatures ranging from -20 °C to 600 °C, enabling a wide range of process operations including etching, oxidation, diffusion, and implantation. Trias is equipped with an 80 MHz quartz resonator for time-dependent processing, as well as a range of other timesaving features such as automated wafer transfer and a central data management system. These features ensure that TEL / TOKYO ELECTRON Trias is easy to maintain and provides reliable operation with minimal downtime. TEL Trias reacts quickly and accurately to changes in process conditions. Its dual spray cathode design requires only two process gases and provides precise control of the etch rate over a large range of operating pressure. A low temperature, high power pure oxyde source minimizes thermal budget and provides stable process conditions. TOKYO ELECTRON Trias also provides advanced safety features, ensuring operator safety and peace of mind. An onboard RFID reader shields the operator from the wafer surface, and a process chamber filter safeguards the environment by capturing ultra-fine particles. By streamlining and automating the etching process, Trias ensures flexibility, repeatability, and cost-effectiveness for semiconductor device fabrication. With its flexibility, high performance, and safety features, TEL / TOKYO ELECTRON Trias is an essential tool for modern semiconductor device fabrication.